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Tribological behavior of chromium nitride coating by unbalanced magnetron sputtering
Journal Title, Volume, Page:
J. of Active and Passive Electronic Devices, Vol. 2, pp. 93–103
Year of Publication:
2007
Preferred Abstract (Original):
The possibility of improving tribological properties of aluminum alloys using a chrome nitride coating is exploded. Thin films of CrxN1−xwere deposited on aluminum 6061 using a reactive sputtering technique in an unbalanced magnetron deposition system. The structure, composition, and morphology of the deposited thin films were characterized by using x-ray diffraction (XRD), scanning electron microscopy (SEM), electron – probe microanalysis (EPMA), and x-ray photoelectron spectroscopy (XPS). 
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